Plasma Cleaners a Wɔde Di Dwuma Pɔtee

Mfiri a wɔde tew plasma/etching no ma plasma ba denam electrode abien a wɔde gu ade a wɔatoto mu mu ma ɛyɛ anyinam ahoɔden so. Wɔde vacuum pump di dwuma de kura vacuum dodow pɔtee bi mu. Bere a mframa no ho yɛ na kɛse no, kwan a ɛda molecule ahorow ne molecule anaa ions a wɔde wɔn ho hyɛ mu no ntam nso kɔ soro. Wɔ anyinam ahoɔden nkɛntɛnso ase no, saa ion ahorow yi bɔ na ɛyɛ plasma. Saa ions yi yɛ adwuma kɛse, na ɛkame ayɛ sɛ ahoɔden a ɛdɔɔso a ebetumi abubu nnuru a ɛka bom no nyinaa, na ɛma nnuru yɛ adwuma wɔ biribiara a ɛda adi so. Ɛsono nnuru a ɛwɔ gas plasma ahorow mu. Sɛ nhwɛso no, oxygen plasma yɛ oxidizing kɛse, etumi oxidizing photoresist ma ɛyɛ gas, na ɛnam so nya ahotew tumi. Corrosive gas plasma wɔ anisotropy a eye kyɛn so, a edi ahwehwɛde ahorow a ɛwɔ etching mu no ho dwuma. Plasma ayaresa ma hann bi ba, enti wɔtoo din glow discharge.
Akwan a wɔfa so tew plasma ho no gyina nneɛma nketenkete a ɛyɛ adwuma a ɛwɔ plasma no mu "a wɔma ɛyɛ adwuma" so titiriw de yi nkekae a ɛwɔ soro no fi hɔ. Wɔ ɔkwan a wɔfa so yɛ ade ho no, mpɛn pii no, plasma a wɔtew ho no fa adeyɛ a edidi so yi ho: wɔkanyan mframa a ɛnyɛ abɔde mu nneɛma ma ɛkɔ plasma tebea mu; wɔtwetwe nneɛma a ɛyɛ mframa gu ade a ɛyɛ den no so; akuw a wɔagye no ne molecule ahorow a ɛwɔ ade a ɛyɛ den no so yɛ adwuma ma ɛyɛ ade molecule ahorow; nneɛma a wɔyɛ no mu nneɛma nketenkete no porɔw kɔ mframa fã no mu; na woyi nneɛma a ɛyɛ adwuma no nkae fi soro.

Ade titiriw a ɛwɔ plasma ahotew mfiridwuma mu ne sɛ ebetumi ayɛ substrate biara ho adwuma, a dade, semiconductors, oxides, ne polymer nneɛma dodow no ara te sɛ polypropylene, polyester, polyimide, polyvinyl chloride, epoxy, ne polytetrafluoroethylene mpo ka ho. Ebetumi asiesie asase no ani nyinaa ne mmeae pɔtee bi, ne adan a ɛyɛ den nso.